Surface morphology study and electrical properties of Si 1-x C x on Si grown by low pressure chemical vapor deposition

Author: He L.   Shi Z.Q.   Jiang N.   Han P.   Zheng Y.D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 15-17

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