TiN reactive sputter deposition studied as a function of the pumping speed

Author: Heuvelman W.M.   Helderman P.   Janssen G.C.A.M.   Radelaar S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 335-339

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Abstract