Stability of the dielectric properties of PECVD deposited carbon-doped SiOF films

Author： Lubguban Jr. J.   Saitoh A.   Kurata Y.   Inokuma T.   Hasegawa S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 67-70

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