Properties of polycrystalline silicon films prepared from fluorinated precursors

Author： Ray S.   Mukhopadhyay S.   Saha S.C.   Hazra S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 7-11

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