Effect of water dose on the atomic layer deposition rate of oxide thin films

Author: Matero R.   Rahtu A.   Ritala M.   Leskela M.   Sajavaara T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.1, 2000-06, pp. : 1-7

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Abstract