Thermodynamics analyses of the effect of CH 3 and C 2 H 2 on morphology of CVD diamond films

Author: Zhang J.-Y.   Wang P.-F.   Ding S.-J.   Wei Zhang D.   Wang J.-T.   Liu Z.-J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 266-268

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