Optical and structural characterization of Si/SiGe heterostructures grown by RTCVD

Author： Sidiki T. Christiansen S.H. Chabert S. de Boer W.B. Ferrari C. Strunk H.P. Sotomayor Torres C.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 431-435

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