Characterization of CN x films prepared by twinned ECR plasma source enhanced DC magnetron sputtering

Author: Xu J.   Deng X.   Zhang J.   Lu W.   Ma T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 107-112

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Abstract