Chemical vapor deposition of nickel oxide films from Ni(C 5 H 5 ) 2 /O 2

Author： Kang J.-K.   Rhee S.-W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.391, Iss.1, 2001-07, pp. : 57-61

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