Preparation of SiN x passivation films for PZT ferroelectric capacitors at low substrate temperatures by catalytic CVD

Author： Minamikawa T.   Yonezawa Y.   Heya A.   Fujimori Y.   Nakamura T.   Masuda A.   Matsumura H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 284-287

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