Patterning of nanometer-scale silicide structures on silicon by 'direct writing focus ion-beam implantation'

Author： Mitan M.M.   Pivin D.P.   Alford T.L.   Mayer J.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.2, 2002-05, pp. : 219-224

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