Ellipsometric characterization of expanding thermal plasma deposited SiO 2 -like films

Author： Creatore M.   Kilic M.   O'Brien K.   Groenen R.   van de Sanden M.C.M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 137-141

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