Shutterless deposition of phosphorous doped microcrystalline silicon by Cat-CVD

Author： Fonrodona M. Gordijn A. van Veen M.K. van der Werf C.H.M. Bertomeu J. Andreu J. Schropp R.E.I.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 145-148

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