Structure and mechanical properties of PACVD fluorinated amorphous carbon films

Author: Bottani C.E.   Lamperti A.   Nobili L.   Ossi P.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 149-154

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