Mechanical, electrical and optical properties of a-C:H:N films deposited by plasma CVD technique

Author： Chakrabarti K. Basu M. Chaudhuri S. Pal A.K. Hanzawa H.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.3, 1999-06, pp. : 405-413

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