Low energy Cs + and Cl - ion implantation into Si - SIMS investigations

Author: Herec J.   Sielanko J.   Filiks J.   Sowa M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 743-748

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content