Can plasma experiments unravel microscopic surface processes in thin film growth and erosion? Implications of particle-beam experiments on the understanding of a-C:H growth

Author： Schwarz-Selinger T.   Meier M.   Hopf C.   von Keudell A.   Jacob W.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.71, Iss.3, 2003-05, pp. : 361-376

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