Degradation in polysilicon thin film transistors related to the quality of the polysilicon material

Author: Toutah H.   Tala-Ighil B.   Llibre J.F.   Boudart B.   Mohammed-Brahim T.   Bonnaud O.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1531-1535

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Abstract