Semiconductor material analysis based on microcalorimeter EDS

Author: Simmnacher B.   Weiland R.   Hohne J.   Feilitzsch F.v.   Hollerith C.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1675-1680

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Abstract