Fabrication of optical transmission elements in an SiN x membrane

Author: Lee C.C.   Chang Y.C.   Chang J.Y.   Chiu C.F.   Chi G.C.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.69, Iss.1, 2003-08, pp. : 10-16

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