Influence of the oxygen content in SiGe on the parameters of Si/SiGe heterojunction bipolar transistors

Author: Knoll D.   Heinemann B.   Bolze D.   Ehwald K.   Fischer G.   Krüger D.   Morgenstern T.   Naumann E.   Schley P.   Tillack B.   Wolansky D.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.27, Iss.9, 1998-09, pp. : 1022-1026

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content