Temperature dependence of the structural properties of amorphous silicon oxynitride layers

Author： Abu El-Oyoun M.   Inokuma T.   Kurata Y.   Hasegawa S.  

Publisher： Elsevier

ISSN： 0038-1101

Source： Solid-State Electronics, Vol.47, Iss.10, 2003-10, pp. : 1669-1676

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