Optimization of plasma nitridation for reliability enhancement of low-temperature gate dielectric in MOS devices

Author: Or D.C.T.   Lai P.T.   Sin J.K.O.  

Publisher: Elsevier

ISSN: 0038-1101

Source: Solid-State Electronics, Vol.47, Iss.11, 2003-11, pp. : 2049-2053

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Abstract