Electrical and structural characterization of defects introduced in p-SiGe during low energy erbium implantation

Author： Mamor M. Pipeleers B. Auret F.D. Maes J. Hayne M. Moshchalkov V.V. Vantomme A.

Publisher： Elsevier

ISSN： 0921-5107

Source： Materials Science and Engineering: B, Vol.105, Iss.1, 2003-12, pp. : 179-183

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