The effects of baking cycles on the properties of ferroelectric thin films

Author: Watts B.E.   Leccabue F.   Fanciulli M.   Ferrari S.   Tallarida G.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 147-152

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Abstract