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Author: Tunaboylu B. Ozkan C.S. Ata A. Ring K. Esener S.
Publisher: Elsevier
ISSN: 1369-8001
Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 199-206
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
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By Deb K. Tamagawa T. Di Y. Gui G. Halpern B. Schmitt J.
Journal of Electronic Materials, Vol. 30, Iss. 2, 2001-02 ,pp. :