Effect of substrates on epitaxial PZT films by a coating photolysis process

Author: Tsuchiya T.   Yamaguchi I.   Manabe T.   Kumagai T.   Mizuta S.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 207-210

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Abstract