SEE characteristics of small feature size devices by using laser backside testing

Author: Guoqiang Feng   Shipeng Shangguan   Yingqi Ma   Jianwei Han  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.33, Iss.1, 2012-01, pp. : 14008-14012

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Abstract