Anisotropic Etching of SiO2 in High-Voltage Gas-Discharge Plasmas

Author: Kazanskii N. L.   Kolpakov V. A.   Kolpakov A. I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.33, Iss.3, 2004-05, pp. : 169-182

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