Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

Author: Ferrando N   Gosálvez M A   Cerdá J   Gadea R   Sato K  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25021-25035

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