Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

Author: Ferrando N   Gosálvez M A   Colóm R J  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25021-25034

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Abstract