Author： Mochizuki Hiroaki Mekaru Harutaka Kusumi Shinji Sato Noriaki Shimizu Masami Yamashita Michiru Shimada Osamu Hattori Tadashi
Publisher： Springer Publishing Company
ISSN： 0946-7076
Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 547-550
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