Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization

By Mochizuki Hiroaki   Mekaru Harutaka   Kusumi Shinji   Sato Noriaki   Shimizu Masami   Yamashita Michiru   Shimada Osamu   Hattori Tadashi  

Microsystem Technologies, Vol. 13, Iss. 5-6, 2007-03 ,pp. : 547-550

Springer Publishing Company

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Reflectivity test of X-ray mirrors for deep X-ray lithography

By Nazmov V.  

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A Si stencil mask for deep X-ray lithography fabricated by MEMS technology

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Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1335-1342

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Submicron polymer structures with X-ray lithography and hot embossing

By Mappes Timo  

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Micro gas bearings fabricated by deep X-ray lithography

By Kim D.   Lee S.   Jin Y.   Desta Y.   Bryant M. D.   Goettert J.  

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 456-461

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