Cylindrical coils created with 3D X-ray lithography and metallization

Author: Matsumoto Yoshifumi  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.14, Iss.9-11, 2008-10, pp. : 1373-1379

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract