Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators

By Campanella Humberto   Narducci Margarita   Soon Jeffrey B W   Merugu Srinivas   Ferrari Marco   Ferrari Vittorio   Singh Navab  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 11, 2015-11 ,pp. : 115016-115027

IOP Publishing

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Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop

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Calculation of coefficients of the temperature dependence of density of inorganic molecular liquids

By Sladkov I.   Shmakova M.  

Russian Journal of Applied Chemistry, Vol. 80, Iss. 3, 2007-03 ,pp. : 501-503

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Piezoelectric polydimethylsiloxane films for MEMS transducers

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Dynamic nonlinear behavior of torsional resonators in MEMS

By Caspani A   Comi C   Corigliano A   Langfelder G   Zega V   Zerbini S  

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