Effects of heavy ion irradiation on ultra-deep-submicron partially-depleted SOI devices

Author: Weikang Wu   Xia An   Fei Tan   Hui Feng   Yehua Chen   Jingjing Liu   Xing Zhang   Ru Huang  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.11, 2015-11, pp. : 114004-114008

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Abstract