Hydrogen profiling and the stoichiometry of an a-SiN x :H film

Author: Avasthi D.K.   Mehta G.K.   Acharya M.G.   Tarey R.D.   Malhotra L.K.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.46, Iss.3, 1995-03, pp. : 265-267

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Abstract