Yttria-stabilized zirconia (YSZ) heteroepitaxially grown on Si substrates by reactive sputtering

Author： Hata T. Sasaki K. Ichikawa Y. Sasaki K.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.2, 2000-11, pp. : 381-389

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