MEMS reliability modelling methodology: application to wobble micromotor failure analysis.

Author： Muratet S. Fourniols J. Soto-Romero G. Endemano A. Marty A. Desmulliez M.

Publisher： Elsevier

ISSN： 0026-2714

Source： Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1945-1949

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