Study of the deep level related to a platinum-dihydrogen complex in Si by capacitance transient spectroscopy under uniaxial stress

Author: Kamiura Y.   Iwagami Y.   Fukuda K.   Yamashita Y.   Ishiyama T.   Tokuda Y.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 352-357

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