Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

Author： Valentini L. Kenny J.M. Montereali R.M. Lozzi L. Santucci S.

Publisher： Elsevier

ISSN： 1369-8001

Source： Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 271-277

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