Characterization of microparticles and oxide layers generated by laser irradiation of diamond-machined silicon wafers

Author： Yan Jiwang   Sakai Shin   Isogai Hiromichi   Izunome Koji  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.26, Iss.2, 2011-02, pp. : 25006-25012

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