Author： Schulze J Schüngel E Donkó Z Czarnetzki U
Publisher： IOP Publishing
ISSN： 0963-0252
Source： Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15017-15028
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
The electrical asymmetry effect (EAE) in geometrically symmetric capacitively coupled radio frequency discharges operated at multiple consecutive harmonics is investigated by a particle-in-cell (PIC) simulation and an analytical model. The model is based on the original EAE model, which is extended by taking into account the floating potentials, the voltage drop across the plasma bulk, and the symmetry parameter resulting from the PIC simulation. Compared with electrically asymmetric dual-frequency discharges we find that (i) a significantly stronger dc self-bias can be generated electrically and that (ii) the mean ion energies at the electrodes can be controlled separately from the ion flux over a broader range by tuning the phase shifts between the individual voltage harmonics. A recipe for the optimization of the applied voltage waveform to generate the strongest possible dc self-bias electrically and to obtain maximum control of the ion energy via the EAE is presented.
Related content
Access to resources
Recommend
Dynamic effects in dual-frequency capacitively coupled discharges
Journal of Physics: Conference Series , Vol. 207, Iss. 1, 2010-01 ,pp. :
Access to resources