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Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas

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Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges

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Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

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Numerical study of dual-frequency capacitively-coupled discharges in electronegative $\chem{SF_{6}}$

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