A wafer-level liquid cavity integrated amperometric gas sensor with ppb-level nitric oxide gas sensitivity

Author: Gatty Hithesh K   Stemme Göran   Roxhed Niclas  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|10|105013-105022

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105013-105022

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract