From diffusion processes to adherence properties in NiTi microactuators

Author: Jarrige I.   Holliger P.   Nguyen T.P.   Ip J.   Jonnard P.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 251-254

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