A novel prototyping method for die-level monolithic integration of MEMS above-IC

Author： Cicek Paul-Vahe   Zhang Qing   Saha Tanmoy   Mahdavi Sareh   Allidina Karim   Nabki Frederic   Mourad El Gamal  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65013-65021

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