Two-dimensional optical scanner with monolithically integrated glass microlens

By Yoo Sunghyun   Jin Joo-Young   Ha Joon-Geun   Ji Chang-Hyeon   Kim Yong-Kweon  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 5, 2014-05 ,pp. : 55009-55016

IOP Publishing

Access to resources Recommend Favorite

Vacuum suction aid for microlens array formation using LIGA-like process

By Shyu Ruey Fang   Yang Hsiharng  

The International Journal of Advanced Manufacturing Technology, Vol. 29, Iss. 5, 2006-06 ,pp. : 518-523

Springer Publishing Company

Access to resources Recommend Favorite

Field-effect piezoresistors for vibration detection of nanobeams by using monolithically integrated MOS capacitors

By Cheng Haitao   Yang Heng   Li XinXin   Wang Yuelin  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 2, 2013-02 ,pp. : 25011-25018

IOP Publishing

Access to resources Recommend Favorite

CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

By Muñoz-Gamarra Jose Luis   Uranga Arantxa   Barniol Nuria  

Micromachines, Vol. 7, Iss. 2, 2016-02 ,pp. : 30-30

MDPI

Access to resources Recommend Favorite

Monolithically Integrated Ge-on-Si Active Photonics

By Liu Jifeng  

Photonics, Vol. 1, Iss. 3, 2014-07 ,pp. : 162-197

MDPI

Access to resources Recommend Favorite