Influences of different oxidants on the characteristics of HfAlO x films deposited by atomic layer deposition

Author: Ji-Bin Fan   Hong-Xia Liu   Fei Ma   Qing-Qing Zhuo   Yue Hao  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.22, Iss.2, 2013-02, pp. : 27702-27706

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