Quantitative analysis of tungsten, oxygen and carbon concentrations in the microcrystalline silicon films deposited by hot-wire CVD

Author: Bouree J.E.   Guillet J.   Grattepain C.   Chaumont J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 110-115

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