Reliable image processing that can extract an atomically-resolved line shape of partial dislocations in semiconductors from plan-view high-resolution electron microscopic images

Author: Inoue M.   Suzuki K.   Amasuga H.   Nakamura M.   Mera Y.   Takeuchi S.   Maeda K.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.75, Iss.1, 1998-10, pp. : 5-14

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Abstract